TECHNOLOGY FOR PRODUCING PIEZOELECTRIC PICOLITER DISPENSERS FOR DIRECT BONDING DNA PRINTING SYSTEMS
Timofey Akulinin,
Denis Nepomnyashchikh,
Alena Talovskaya,
Evgeny Barbin,
Ivan Kulinich
Abstract: The article presents a technology for producing a picoliter-range liquid microdispenser based on silicon substrates using the method of direct silicon-to-silicon bonding. The chemical cleaning and activation modes of surfaces and bonding parameters are described. The influence of roughness on the bonding results is investigated, and tests are conducted on the rupture strength of 10 samples and droplet formation.
Keywords: DNA printing, Liquid microdispenser, Silicon substrate, Direct bonding, Surface activation, Roughness, Bond strength, Picoliter
DOI: 10.24874/PES08.02B.004
Recieved: Revised: Accepted:
UDC:
Reads: 1 
